准分子激光镜片

50年的经验,给您最高品质的紫外光学元件和镀膜!

美国Acton公司是全球最早、最专业的紫外,包括真空紫外光学镜片和镀膜的公司,其紫外及真空紫外光学元件广泛应用在各类尖端的科学研究和高端的工业仪器中。
  • -1961年成立,专业生产高端紫外镜片和镀膜产品近50年!
  • -1975年开始提供镜片给NASA-Apollo/Soyuz (阿波罗航天探月飞机项目)
  • -特有VUV系列,最短波长到真空紫外120nm的镜片和镀膜
  • -不断创新,更高性能:更高反射率、更高损伤阈值、更长寿命……






Excimer Laser Antireflection Coatings

UV antireflection coatings are durable electron-beam deposited dielectrics designed to minimize reflections that normally occur with uncoated surfaces. These low-absorption coatings are ideal for increasing the transmittance properties of lenses and for reducing second-surface reflections of beamsplitters. They offer high resistance to laser damage, making them suitable for high-energy laser usage. Coatings can be applied to customer-supplied material or provided on our substrates and lenses. (Reflectance of uncoated fused silica is 4.8% per surface at 193 nm and 4.1% per surface at 248 nm).

Acton Optics include the highest quality optical components for all excimer laser wavelengths, including:
We are continuously improving our thin film designs and coating processes to meet the rigorous applications these and other markets:
  • Medical
  • Semiconductor
  • Industrial
  • Research
Excimer Laser Mirrors
Our high-power excimer laser mirrors are multi-layer dielectric coated mirrors designed for use with high energy excimer lasers. These coatings have yielded superior high damage thresholds. We maintain a stock supply of these beam-turning and normal incidence mirrors for fast delivery to your facility. Mirrors and coatings on Acton mirror blanks or customer supplied material can be produced and supplied in volume, keeping the price very competitive.
Request a quote for your specific requirement.

Key Benefits
  • Highest damage thresholds
  • Longest lifetimes
  • Wide variety of coatings available
  • All excimer wavelengths: 157nm, 193nm, 248nm, 308nm, 353nm
Key Applications
  • Excimer laser vision correction systems (LASIK)
  • Semiconductor laser and metrology systems
  • Materials processing applications
Standard Excimer Mirror Coatings 
Wavelength%R at NI%R at 45 AOI Damage ThresholdCoating Curve
157nm>= 91%>= 89%0.3 - 0.75 J/cm2view curves
193nm>= 97%>= 97%1 - 2 J/cm2view curves
248nm>= 98%>= 97%4 - 7 J/cm2view curves
308nm>= 98%>= 97%4 - 7 J/cm2view curves
353nm>= 99%>= 98%4 - 7 J/cm2view curves
 Link to Acton standard mirror blanks
Partial Reflectors / Beamsplitters
Acton Optics multi-layer dielectric coatings are ideal for beamsplitting applications, laser cavity output couplers, and beam attenuators. These coatings are manufactured with extremely low absorption characteristics. They are calibrated for reflectance and transmittance at the laser wavelength and angle of incidence specified to insure excellent performance in high power laser applications.
Beamplitter coatings can be specifically designed with transmission values between 10 +/-2% to 90 +/-5%. Standard beamsplitters are designed for random polarization, but can be optimized for horizontal "P" polarization or vertical "S" polarization if required. Beamsplitters are available with or without antireflection coatings.
Excimer Laser Antireflection Coatings
UV antireflection coatings are durable electron-beam deposited dielectrics designed to minimize reflections that normally occur with uncoated surfaces. These low-absorption coatings are ideal for increasing the transmittance properties of lenses and for reducing second-surface reflections of beamsplitters. They offer high resistance to laser damage, making them suitable for high-energy laser usage. Coatings can be applied to customer-supplied material or provided on our substrates and lenses. (Reflectance of uncoated fused silica is 4.8% per surface at 193 nm and 4.1% per surface at 248 nm).
Listed below are standard excimer laser antireflection coatings with specifications and calibration curves for your reference.
Please complete the Request Pricing form to receive a quote on your requirement.
Laser WavelengthLaser Type% R at NI Coating Curve
157nmF2</= 0.5%view curve
193nmArF</= 0.5%view curve
248nmKrF</= 0.3%view curve
308nmXeCl</= 0.3%view curve
353nmXeF</= 0.3%view curve

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