产品线 | SR系列 | ||||||||||
产品系列 | SR-1908 | SR-2013 | SR-2812 | SR-4513 | SR-5018 | SR-5714 | SR-5714C | SR-7012 | SR-7021 | ||
Mechanical | blocking torque[N cm] | ≥0.5 | ≥0.5 | ≥3 | ≥5 | ≥7 | ≥7 | ≥5 | ≥10 | ≥10 | Mechanical |
Max. normal force[N] | 3 | 3 | 3 | 20 | 20 | 25 | 25 | 25 | 25 | ||
Dimension[mm2] | 24.7x20 | 25.5x20 | 37.5x30 | 45x45 | 50x50 | 57x57 | 57x57 | 70x70 | 90x90 | ||
Height[mm] | 8.5 | 10.2 | 12 | 12.5 | 16.5 | 14 | 13.75 | 12 | 21 | ||
Weight[g] | 13 | 11 | 35 | 89 | 100 | 110 | 105 | 100 | 400 | ||
Aperture[mm] | 7 | 9 | 8 | 8 | 25 | 25 | 30 | 25 | |||
Stage diameter[mm] | 19 | 15 | 28 | 36 | 41 | 57 | 48 | 60 | 70 | ||
Open-loop Open- | Travel[?] | ∞ | ∞ | ∞ | ∞ | ∞ | ∞ | ∞ | ∞ | ∞ | Open-Loop |
Step width[m?] | 0.3 .. 3 | 0.3 .. 3 | 0.3 .. 3 | 0.3 .. 3 | 0.2 .. 2 | 0.2 .. 2 | 0.2 .. 2 | 0.2 .. 2 | 0.2 .. 2 | ||
Scan range[m?] | ≥8 | ≥4 | ≥4 | ≥3.8 | ≥2.3 | ≥2.3 | ≥2.5 | ≥3.1 | |||
Scan resolution[µ?] | <2 | <1 | <1 | <1 | <0.5 | <0.5 | <0.5 | <0.5 | |||
Angular speed[?/s] | ≥45 | ≥45 | ≥25 | ≥15 | ≥15 | ≥9 | ≥9 | ≥9 | ≥9 | ||
Max.frequency[kHz] | 18.5 | 18.5 | 18.5 | 18.5 | 18.5 | 18.5 | 18.5 | 18.5 | 18.5 | ||
Closed-loop | Sensor resolution[µ?] | 25 | 15 | 15 | 500 | 15 | 15 | 15 | 15 | Closed-Loop | |
Closed-loop resolution µ?] | 1000(H)CU, 500(MCS) | ||||||||||
Sensor types | -S | -S | -S | -M,(-S) | -S | -S | -S | -S | |||
Vacuum compatibility | HV | HV,UHV | HV,UHV | HV | HV | HV | HV,UHV | HV | HV,UHV |
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